Indandatho yeClamp 0200-15001

I-AMAT 0200-15001 Clamp Ring yenye yezona zinto zibalulekileyo kwizixhobo ze-semiconductor chambers ze-Applied Materials (AMAT). Yi-alumina (Al₂O₃) ceramic clamping/compression component esetyenziswa kakhulu kwiimodyuli zenkqubo yokubeka kunye nokusika. Ixabiso layo eliphambili alikho ekuthatheni inxaxheba ngokuthe ngqo kwiimpendulo, kodwa ekugcineni uzinzo lwesakhiwo segumbi kunye nokuhambelana kwendawo yenkqubo.

1. Isishwankathelo seMveliso kunye neempawu zezinto (Al₂O₃)

● Igama leMveliso: AMAT 0200-15001 Indandatho yeClamp

● Udidi: Ikhonkco leClamp yeCeramic Ceramic / Icandelo leClamp yeChamber

● Izinto eziphathekayo: I-ceramic ye-alumina ecocekileyo kakhulu (Al₂O₃)

2. Imisebenzi ephambili kwiZixhobo zeSemiconductor

Ngaphakathi kwesakhiwo segumbi le-AMAT, le Ring yeClamp isebenza ngokuyintloko kwimisebenzi yokuthintela oomatshini kunye nokuqinisekisa uzinzo lwenkqubo:

① Ukulungiswa kwesakhiwo kunye nokuBanjwa kwegumbi

Isetyenziselwa ukulungisa ngokukhuselekileyo izinto ezibalulekileyo zegumbi, kuquka:

●I-Quartz (izinto ze-quartz)

●Iliner (umgca wegumbi)

●Isangqa somphetho (isakhiwo sesangqa somphetho)

●Ishawa (isakhiwo sokusasazwa kwegesi)

Ukubotshwa ngokuchanekileyo kuthintela ukungalingani kwesakhiwo okubangelwa kukwanda kobushushu okanye uxinzelelo lwe-vacuum.

② Ulawulo lwePlasma Uniformity

Ukuchaneka kwejometri yeClamp Ring kunefuthe ngqo:

●Ulungelelwaniso lokusasazwa kwentsimi yombane

●Ukulingana kobuninzi beplasma

●Ubuchule bokulawula isiphumo somda

Oku kubaluleke kakhulu kwiinkqubo eziphambili (≤28 nm).

③ Ulawulo lweeNgcawu kunye noQinisekiso lweNzuzo

Uzinzo lolwakhiwo lunciphisa ukungcangcazela okuncinci kunye nokungqubana, ngaloo ndlela kunciphisa:

●ukuveliswa kwamasuntswana amancinci

● ungcoliseko lomphetho wewafer

●ukuguquguquka kobuninzi beziphene

3. Iindlela eziqhelekileyo zokusilela (Uhlalutyo lokusilela)

Ngokusekelwe kumava eSemixlab ekugcinweni nasekuhlaziyweni kwezixhobo, iindlela eziqhelekileyo zokusilela kolu hlobo lwe-Al₂O₃ Clamp Ring ziquka:

① Ukukhukuliseka kwePlasma

Ukuvezwa ixesha elide kwindawo yegesi yokusabela kukhokelela koku:

● Ukurhawuzelela umphezulu

● Ukutshiza kwezinto

●Ukukhululwa kwamasuntswana okwandisiweyo

② Uxinzelelo olushushu luyaqhekeka

Okubangelwa kukutshintsha kweqondo lobushushu ngokukhawuleza (ukujikeleza kobushushu):

●Ukwakhiwa nokusasazwa kwee-microcracks

●Ukuncipha kwamandla olwakhiwo

●Umngcipheko onokubakho wokuqhekeka kwethambo

③ Ukuqhekeza Umphetho

Iqhele ukubonwa kwiimeko ze:

● Uxinzelelo lokufakelwa olungalinganiyo

●Ulawulo olungalunganga lwe-torque

●Impembelelo yoomatshini

④ Ukusilela kokukhupha igesi ngamasuntswana

Ukukhululwa kwamasuntswana e-Al₂O₃ emva kokuwohloka komphezulu:

●Ukwanda kwezinga lokungasebenzi kakuhle kwe-wafer

●Ifestile yenkqubo encinci

⑤ Ukutshintsha kwemilinganiselo

Utshintsho kwisakhiwo se-microstructure olubangelwa kukulayisha ubushushu ixesha elide:

● Ukuchaneka kokulungelelaniswa okunciphileyo

●Ukuvalwa kwegumbi okonakeleyo