0200-04877 Indandatho yeCeramic enye

I-AMAT 0200-04877 Single Ring Ceramics idla ngokusetyenziswa kwiigumbi zokufaka i-plasma etch okanye kwiindawo zokubeka izinto ngaphakathi kwamaqonga ezixhobo zokwenza izixhobo ze-semiconductor. Ngokwesakhiwo, ikwicandelo lezixhobo zering ze-ceramic zegumbi ezenzelwe ukuxhasa ukuvalelwa kwe-plasma, ukufana kwenkqubo yomphetho, kunye nokukhuselwa kwegumbi.

Eli candelo lidla ngokunxulunyaniswa ne:

● Iinkqubo zokuQokelela iPlasma

●Iigumbi zeDPS (Umthombo wePlasma oDibeneyo)

●Izixhobo zeHDP-CVD

●Amaqonga Okucwangcisa I-Semiconductor Aphambili

Ukwakhiwa kwezinto kunye neenzuzo

Ukusebenza kweringi yeseramikhi ye-semiconductor kuxhomekeke kakhulu kubunyulu bayo bezinto, uzinzo lwe-dielectric, kunye neempawu zokuxhathisa i-plasma. I-AMAT 0200-04877 Single Ring Ceramics idla ngokwenziwa kusetyenziswa izixhobo zeseramikhi eziphucukileyo nezicocekileyo ezenzelwe iimeko ezinzima zokucubungula i-plasma.

Ngokuxhomekeke kwiimfuno ezithile zenkqubo, iinkqubo zezinto eziqhelekileyo zingabandakanya:

●I-Alumina ecocekileyo kakhulu (Al₂O₃)

●Iiseramikhi ezigqunywe yiY₂O₃

●I-Aluminium Nitride (AlN)

●Iiseramikhi zeSilicon Carbide (SiC)

Phakathi kwezi, i-alumina ecocekileyo kakhulu isasele yenye yezona zinto zisetyenziswa kakhulu ngenxa yokulinganisela kwayo okugqwesileyo kokusebenza kokugquma, ukuqina kweplasma, kunye nozinzo loomatshini.

1. Ukumelana nePlasma okuBalaseleyo

Kwiindawo zeplasma ezisekelwe kwi-fluorine ezifana ne-CF₄, i-NF₃, kunye ne-C₄F₈ chemistryries, izinto zegumbi zihlala zichatshazelwa yi-ion bombardment kunye ne-reactive radicals. Izixhobo ze-ceramic ezicocekileyo kakhulu zibonelela ngokumelana okuphezulu nokukhukuliseka kweplasma, zinceda ekunciphiseni ukubola komphezulu kwaye zandise ubomi benkonzo yecandelo.

2. Ukuveliswa kwamasuntswana aphantsi

Ungcoliseko lwamasuntswana lusengomnye wemingeni ebalulekileyo ekuvelisweni kwee-semiconductor. Ukulungiswa ngokuchanekileyo kwe-ceramic kunye nokugqitywa komphezulu okwenziwe kakuhle kunceda ekunciphiseni ukuchitheka kwamasuntswana ngexesha lokusebenza kwegumbi ixesha elide, okuncedisa ekuphuculeni isivuno se-wafer kunye nokuzinza kwenkqubo.

3. Ukufakwa kombane okugqwesileyo

Izinto zesangqa se-ceramic ziyilwe ngeempawu ze-dielectric ezizinzileyo ezixhasa ukusasazwa kwentsimi ye-RF elawulwayo ngaphakathi kwegumbi. Oku kunceda ukugcina ukufana kwe-plasma ngelixa kuthintela ukuphazamiseka kombane okungafunekiyo ngexesha lokucubungula i-plasma enoxinano oluphezulu.

4. Ukuzinza okuphezulu kweThermal

Iiceramics eziphambili zigcina ulwakhiwo luqinile phantsi kwamaqondo obushushu aphezulu kunye neemeko ezinzima zokucubungula. Iimpawu zazo zokuguquguquka kobushushu obuphantsi zinceda ukugcina ukuhambelana okulinganayo kunye nokuphindaphinda kwenkqubo kwimijikelo emide yokusebenza.

5. Ucoceko oluBalaseleyo lweeKhemikhali

Izixhobo zeseramikhi ezikumgangatho we-semiconductor zenziwe ngamanqanaba okungcola alawulwa ngokuqinileyo ukunciphisa umngcipheko wokungcola kwizicelo zokucubungula i-wafer ezingaphambili, nto leyo ezenza zifaneleke kwiindawo eziphambili zokwenza i-semiconductor.

Indawo kunye nomsebenzi ngaphakathi kwezixhobo ze-semiconductor

Ngaphakathi kwamagumbi eplasma e-semiconductor, i-AMAT 0200-04877 Single Ring Ceramics idla ngokubekwe kwindawo yokucubungula i-wafer, ngokuqhelekileyo kufutshane ne-electrostatic chuck (ESC) okanye indawo yokuvalelwa kweplasma.

Nangona incinci ngesakhiwo, ukubaluleka kwayo ekusebenzeni kubalulekile.

Omnye wemisebenzi yayo ephambili kukunceda ukulawula ukusasazwa kweplasma kufutshane nomphetho we-wafer. Kwiinkqubo ze-semiconductor eziphambili, nokuba utshintsho oluncinci kwi-edge plasma density lunokukhokelela ekuphambukeni kweprofayili, ukungangqinelani kobukhulu obubalulekileyo, okanye kwiimeko zokuqhekeka komphetho. I-ceramic ring inceda ukuzinzisa imeko-bume yeplasma yendawo, iphucule ukufana kwenkqubo yomphetho kwaye iphucule isivuno se-wafer iyonke.

Ukongeza, iringi isebenza njengomqobo okhuselayo phakathi kweplasma kunye nezinto ezibalulekileyo zegumbi. Ngokukhusela iindawo ezingqongileyo kwi-ion bombardment ethe ngqo, inceda ekunciphiseni ukukhukuliseka kwegumbi kwaye yehlise amaxesha okugcinwa.

Iipropati ze-dielectric zezinto ze-ceramic nazo zinegalelo kulawulo lwentsimi ye-RF ngaphakathi kwigumbi. Ekubeni ukuziphatha kwe-plasma kunxulumene ngokusondeleyo nokusasazwa kwe-impedance kunye nokwakheka kwe-sheath, i-geometry kunye neempawu zezinto zeringi ye-ceramic zichaphazela ngokuthe ngqo ukuvalelwa kwe-plasma kunye nolawulo lwe-ion trajectory.

Njengoko iitekhnoloji ze-semiconductor ziqhubeka zisiya kwiindawo ezincinci kunye noyilo lwezixhobo oluntsonkothileyo, uzinzo lwenkqubo yegumbi luxhomekeka ngakumbi kwizinto ezicwangciswe ngokuchanekileyo ezifana neeringi ze-ceramic. Ngenxa yesi sizathu, i-AMAT 0200-04877 Single Ring Ceramics ithathwa njengecandelo elibalulekileyo lolawulo lwenkqubo ye-plasma kwiinkqubo zokuvelisa ze-semiconductor zanamhlanje.