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SiC inwebu yeceramic
I-SiC Ceramic Membrane eyenziwe yi-Semixlab Semiconductor yi-precision-engineered porous silicon carbide component eyenzelwe i-ultra-clean kunye ne-high-temperature environments kwi-CVD, MOCVD, kunye neenkqubo ze-PECVD. Ngozinzo olukhethekileyo lweekhemikhali, amandla omatshini, kunye ne-thermal conductivity, ibonelela ngolawulo oluthembekileyo lokuhamba kwegesi, ukuhluzwa kwamasuntswana, kunye nokuthintela ukungcoliseka ngaphakathi kwee-reactors ze-semiconductor.
inkcazelo
Kwimveliso ye-semiconductor ephucukileyo, iSiC Ceramic Membrane isebenza njengenxalenye yemisebenzi emininzi echaphazela ngokuthe ngqo ukuzinza kwenkqubo, ukufana kwe-wafer, kunye nokusebenza kwesivuno ngokubanzi. Ngaphakathi kwe-CVD, i-MOCVD, kunye neenkqubo ze-PECVD, isebenza njengento ebalulekileyo phakathi kweegesi zenkqubo kunye nemeko yokusabela, iqinisekisa ulawulo oluchanekileyo lwe-flow dynamics, ibhalansi ye-thermal, kunye nokunyanzeliswa kokungcola.
Ngobuchule bayo obufanayo obufanayo, i-membrane ye-SiC ikhuthaza i-laminar kunye nokuhanjiswa kwegesi ngokulinganayo kuwo wonke umphezulu we-wafer. Lo mmandla wokuhamba okufanayo unciphisa ukuhluka kwendawo ekugxininiseni kwangaphambili, ngaloo ndlela iphucula ukufana kwefilimu kunye nokuhambelana kwe-consistency ngexesha le-epitaxial okanye i-dielectric deposition. Kwangaxeshanye, ubume bepore bemembrane busebenza njengesihluzi esisebenzayo sobushushu obuphezulu, ukubamba i-condensates, iintsalela zekhabhoni, kunye ne-submicron particulates ngaphambi kokuba zifike kwindawo esebenzayo ye-wafer-into ebalulekileyo ekunciphiseni ukuxinana kwesiphene kunye nokugcina ukuthembeka okuphezulu kwesixhobo.
Ngaphandle kokuhamba kunye nokuhluzwa, i-matrix ye-ceramic ye-SiC inikeza umqobo oqinileyo we-thermal kunye neekhemikhali ngaphakathi kwegumbi lenkqubo. Ikwahlula amacandelo anovakalelo kwiintlobo ezisebenzayo, ithomalalisa ukosuleleka ngasemva, kwaye igcina ucoceko lwegumbi ngexesha lemijikelo eyandisiweyo yemveliso. Kwimimandla yokukhupha, iteknoloji ye-membrane efanayo ingaqeshwa ukuzinzisa uxinzelelo kunye nomgibe weemveliso ezishiyekileyo, ezinegalelo kwimigca yokukhupha ecocekileyo kunye namaxesha okugcina ixesha elide.
Ngokudibanisa le misebenzi ibe yinto enye ehlala ixesha elide, i-SiC Ceramic Membrane ayiphuculi nje kuphela ukusebenza kakuhle kwe-CVD kunye ne-MOCVD reactors kodwa ivumela indawo ezinzileyo kunye nenkqubo ephindaphindiweyo-enye ehlangabezana nokucoceka okungqongqo kunye neemfuno zokusebenza kwisizukulwana esilandelayo se-semiconductor fabrication.
Yenziwa njani inwebu ye-ceramic ye-SiC
Ivenkile yeeMveliso zeSemixlab
