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0200-10377 I-Ring Single 195mm DPS Chamber
Apha eSemixlab, sinikezela ngezinto zeseramikhi ze-semiconductor ezisebenzayo kakhulu ezenzelwe iimeko ezifuna ukucubungula i-plasma. I-AMAT 0200-10377 Ring Single 195mm DPS Chamber yethu yenzelwe iinkqubo zokukrola ze-Applied Materials (AMAT) DPS, ezibonelela ngozinzo olugqwesileyo lwe-plasma, ukhuseleko lwegumbi, kunye nokufana kwenkqubo yokwenziwa kwe-semiconductor ephucukileyo.
inkcazelo
Yenziwe ngezixhobo zeseramikhi ezikumgangatho ophezulu kunye netekhnoloji yokulungisa ngokuchanekileyo, le nxalenye yeringi yeseramikhi inika ukumelana okugqwesileyo nokukhukuliseka kweplasma, ukujikeleza kobushushu, kunye nokuveliswa kwamasuntswana kwiindawo ezinomileyo ezomileyo.
I-AMAT 0200-10377 Ring Single 195mm DPS Chamber yinxalenye yeringi yeseramikhi echanekileyo esetyenziswa kakhulu kwiinkqubo ze-AMAT DPS (Decoupled Plasma Source) kwiinkqubo zokucubungula i-wafer ze-200mm.
Ezona mpawu:
● Izinto zeseramikhi ezicocekileyo kakhulu
● Ukuhambelana kakuhle kwe-plasma ye-RF
● Ungcoliseko oluphantsi kunye nokuveliswa kwamasuntswana
● Ukumelana nokukhukuliseka kweplasma okuphezulu
● Uzinzo oluphezulu loomatshini kunye nobushushu
● Umatshini wokulungisa ngokuchanekileyo ukuhlanganiswa kwegumbi le-DPS
Iindima kwiiNkqubo ze-AMAT DPS
Kwiinkqubo zokugrumba iplasma ze-AMAT DPS, iRing Single 195mm Ceramic Component isebenza njengecandelo elibalulekileyo lolawulo lweplasma kunye nokukhusela igumbi.
Ulawulo lwePlasma Edge
Indandatho yeseramikhi inceda ukuphucula ukusasazwa kweplasma kufutshane nomphetho we-wafer, iphucula ukufana kwe-etching kwaye inciphise ukuphambuka kwenkqubo yomphetho ngexesha lokucubungula iplasma enoxinano oluphezulu.
I-ESC kunye noKhuseleko lweChamber
Ifakwe kwindawo ejikeleze i-electrostatic chuck (ESC), le ring isebenza njengomqobo okhuselayo kwiikhemikhali zeplasma ezinamandla, inceda ekunciphiseni ukukhukuliseka kwegumbi kwaye yandise ubomi becandelo.
Uzinzo lwePlasma yeRF
Ngeempawu ze-dielectric ezizinzileyo, iringi yeseramikhi inegalelo ekuphuculeni ukudibana kwe-RF kunye nokuzinza kweplasma ngaphakathi kwegumbi le-DPS.
UkuNcitshiswa kokuNcitshiswa
Ulwakhiwo lwayo lwe-ceramic olucocekileyo kakhulu lunciphisa ukuveliswa kwamasuntswana kunye nongcoliseko lwesinyithi, luxhasa iimfuno zokucoceka kweenkqubo ze-semiconductor eziphambili.
Izicelo eziqhelekileyo kwiinkqubo ze-Semiconductor
I-AMAT 0200-10377 Ring Single 195mm DPS Chamber isetyenziswa kakhulu kwizicelo eziphambili zokucoca i-dry etching kunye ne-plasma, kuquka:
Ukukrola ngeDielectric: Ixhasa ukuziphatha okuzinzileyo kweplasma ngexesha leenkqubo zokugrumba i-oxide kunye ne-dielectric layer.
I-Oxide kunye ne-Contact Etch: Inceda ukuphucula ukufana kwe-etch kunye nolawulo lomphetho we-wafer ekunxibelelaneni nasekubunjweni kweenkqubo.
Ukukrola ngesinyithi: Ibonelela ngokhuseleko lwegumbi kunye nokuzinza kwenkqubo kwiindawo zokugrumba i-plasma yesinyithi.
Ukucubungula iPlasma okuPhambili: Ifanelekile ukusetyenziswa kweplasma enoxinano oluphezulu olufuna ungcoliseko oluphantsi lwamasuntswana kunye nokusebenza okuzinzileyo kweRF.
Ukuveliswa kweeSemiconductor ze-200mm: Yenzelwe iinkqubo ze-AMAT DPS ezicubungula ii-wafers ze-intshi ezi-8 kwiifab ze-semiconductor.
Kutheni iSemixlab?
I-Semixlab igxile kwizixhobo zeseramikhi ze-semiconductor eziphambili zokugrumba i-plasma, ukubeka, kunye nezixhobo zokucubungula ubushushu.
Sinika:
● Izixhobo zeseramikhi ezikumgangatho we-semiconductor
● Amandla okulungisa ngokuchanekileyo
● Izixhobo ze-semiconductor ezihambelana ne-OEM
● Ulawulo lomgangatho oluzinzileyo
● Izisombululo zeseramikhi ezenziwe ngokwezifiso
Injongo yethu kukuxhasa abavelisi be-semiconductor ngezisombululo zezinto ezithembekileyo nezisebenza kakuhle kwizixhobo zokwenza ii-wafer zesizukulwana esilandelayo.
Iinkonzo zethu
