0200-06508 Isihlangu seCeramic esingaphezulu kwe-300mm

Kwiinkqubo zokucubungula i-plasma ye-semiconductor eziphambili, izinto zokukhusela igumbi zidlala indima ebalulekileyo ekugcineni uzinzo lwenkqubo, ulawulo longcoliseko, kunye nobomi bezixhobo. I-0200-06508 Ceramic Shield Top 300mm yinxalenye yegumbi le-ceramic eyenziwe ngokuchanekileyo eyenzelwe iindawo ze-plasma ezisebenzayo kakhulu kwimveliso ye-semiconductor.

Kwa-Semixlab, sinikezela ngezinto zeseramikhi ze-semiconductor ezicocekileyo kakhulu ezenzelwe i-PECVD efunekayo, i-plasma etch, kunye nokusetyenziswa kwe-deposition, ukunceda ii-fabs ukuphucula ukuthembeka kwegumbi kunye nokuhambelana kwenkqubo ye-wafer.

Uhlolo lweMveliso

I-Ceramic Shield Top yinxalenye ye-ceramic ekhuselayo efakwe ngaphakathi kummandla ophezulu wamagumbi enkqubo ye-semiconductor, ngokuqhelekileyo kufutshane neendawo zokuvelisa i-plasma kunye nokusasazwa kwegesi.

Umsebenzi wayo oyintloko kukukhusela umzimba wegumbi kunye nezakhiwo zangaphakathi zesinyithi ekuvezweni ngokuthe ngqo kwiplasma, ukubola kweekhemikhali, kunye nokwakheka kwe-deposition ngexesha leenkqubo zokwenziwa kwe-semiconductor.

I-0200-06508 Ceramic Shield Top 300mm yenzelwe iinkqubo eziphambili zokucubungula i-wafer ze-300mm apho uzinzo lwe-plasma, ukuveliswa kwamasuntswana aphantsi, kunye nolawulo longcoliseko kubalulekile.

● Imisebenzi ephambili yeSeamic Shield Top

● Khusela imiphezulu yegumbi ekukhukulisekeni kweplasma

● Nciphisa ungcoliseko lwamasuntswana ngaphakathi kwigumbi

● Gcina i-RF kunye neendawo zeplasma zizinzile

● Phucula ukucoceka kwegumbi kunye nokuphindaphinda kwenkqubo

● Yandisa amaxesha okugcinwa kwezixhobo kunye nobomi bezinto ezisetyenzisiweyo

Njengoko izakhiwo zezixhobo ze-semiconductor ziqhubeka zincipha, izinto zokukhusela igumbi ezifana nezikhuselo ze-ceramic ziye zabaluleka ngakumbi ekuphuculeni isivuno kunye nokuzinza kwenkqubo.

Iindima eziqhelekileyo kwiiNkqubo zeSemiconductor

I-AMAT 0200-06508 Ceramic Shield Top isetyenziswa kakhulu kwizixhobo zokucubungula i-plasma ze-Applied Materials (AMAT) zokwenza i-wafer ye-300mm.

Ifakwe kwindawo ephezulu yegumbi, le nxalenye yeseramikhi isebenza njengenxalenye ebalulekileyo yokukhusela ejongene neplasma kwiindawo zokucubungula iplasma ezinoxinano olukhulu.

Iindima eziphambili ziquka:

1. Ukukhusela iPlasma

Ikhaka le-ceramic liyahlula isakhiwo segumbi kwi-plasma bombardment enamandla, nto leyo enceda ekuthinteleni:

● ukukhukuliseka kodonga lwegumbi

● ungcoliseko lwesinyithi

● umonakalo womphezulu

2. Ukunciphisa amasuntswana

Ukuveliswa kwee-semiconductor eziphambili kufuna iindawo ezincinci kakhulu.

I-Ceramic Shield Top inceda ukunciphisa:

● ukutshiza izinto

● ukuqhekeka

● inkunkuma ebangelwa yiplasma

3. Uzinzo lwe-RF kunye nePlasma

Ngenxa yeempawu zayo ezizinzileyo ze-dielectric, ikhaka le-ceramic linegalelo koku:

● uxinano oluzinzileyo lweplasma

● ukuziphatha okuguquguqukayo kwe-RF

● ukuphuculwa kokufana kwenkqubo

4. Ulwandiso lobomi bonke begumbi

Ngokukhusela izakhiwo ezibalulekileyo zegumbi ekuhlaselweni ngokuthe ngqo yiplasma, isikhuselo se-ceramic sinceda ukunciphisa ukuguguleka kwegumbi kunye nokugcinwa rhoqo, siphucula ixesha lokusebenza kwezixhobo kunye nokusebenza kakuhle.

Ukuqukumbela, i-0200-06508 Ceramic Shield Top 300mm yinxalenye yokukhusela igumbi le-ceramic le-alumina elicocekileyo kakhulu elenzelwe ukuphucula uzinzo lwe-plasma, ukunciphisa ungcoliseko, kunye nokuphucula ukuthembeka kwenkqubo kwiinkqubo zokuvelisa ze-semiconductor eziphambili.

Kutheni ukhetha iSemixlab?

I-Semixlab igxile kwizixhobo zeseramikhi ze-semiconductor ezisebenza kakuhle kakhulu zokucubungula i-plasma kunye neendawo zokwenza ii-wafer eziphucukileyo.

Sinika:

● Izixhobo zegumbi le-ceramic ezicocekileyo kakhulu

● Izixhobo zokutshintsha ii-semiconductor ezichanekileyo

● Izisombululo zeseramikhi ezimelana neplasma ezenziwe ngokwezifiso

● Inkxaso ethembekileyo ye-semiconductor OEM kunye nezicelo ze-fab

Iimveliso zethu zenzelwe ukuhlangabezana neemfuno ezingqongqo zeenkqubo zanamhlanje zokwenza ii-semiconductor. Sinethemba lokuba liqabane lakho lexesha elide eTshayina.