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0200-35223 Indandatho yeSeramiki
I-AMAT 0200-35223 Ceramic Ring yinxalenye ye-semiconductor ceramic echanekileyo kakhulu eyenzelwe iindawo eziphambili ze-plasma etch kunye ne-deposition. Isetyenziswa kakhulu kwiinkqubo zokucubungula i-semiconductor, le ring ye-ceramic inceda ukulawula ukuziphatha kwe-plasma ngaphakathi kwegumbi ngelixa ixhasa ukusasazwa kwentsimi ye-RF ezinzileyo kunye nokunciphisa umngcipheko wokungcola ngexesha leenkqubo zokwenza i-wafer. Kwa-Semixlab, sigxile ekuveliseni nasekunikezeni iindawo ezingasetyenziswayo ze-ceramic ze-semiconductor ezenzelwe usetyenziso lwe-plasma oluxineneyo, amagumbi e-etch aphucukileyo, kunye neendawo ezibalulekileyo zokucubungula i-wafer. Ndilangazelela umbuzo wakho.
inkcazelo
I-AMAT 0200-35223 Ceramic Ring ikwicandelo lee-semiconductor plasma chamber ceramic rings ezidityaniswe kwiinkqubo ze-etch kunye ne-deposition eziphucukileyo. Ngokwesakhiwo, yenzelwe njengecandelo le-ring elinobunjineli obuchanekileyo elibekwe kufutshane nommandla wokucubungula i-wafer, ngokuqhelekileyo lijikeleze i-electrostatic chuck (ESC), indawo yokuvalelwa kwe-plasma, okanye indawo yotshintsho lomda we-chamber.
Nangona incinci ngembonakalo, indima yayo ngaphakathi kwegumbi ibaluleke kakhulu. Ngexesha lokucubungula i-plasma, indawo yomphetho we-wafer ifumana ukusebenzisana okuntsonkothileyo phakathi kwamasimi e-RF, ii-ion trajectories, kunye nokusasazwa koxinano lwe-plasma. Ngaphandle kokulungiswa ngokufanelekileyo kwegumbi, olu nxibelelwano lunokukhokelela ekungazinzini kwenkqubo, ukungangqinelani kweprofayili yomphetho, kunye nokuziphatha okungafaniyo kokugrumba okanye ukubekwa kwe-deposition.
Indandatho yeseramikhi isebenza njengonxibelelwano olusebenzayo lolawulo lweplasma phakathi kwe-wafer kunye nezakhiwo zegumbi elijikelezileyo. Ngokuchaphazela ukusasazwa kwentsimi yombane yendawo kunye nokuzinzisa iimeko zeplasma kufutshane nomphetho we-wafer, inceda ukuphucula ukuhambelana kwenkqubo yegumbi kunye nokuveliswa kwe-wafer.
Imisebenzi ephambili yeRingi yeCeramic ye-0200-35223
Omnye wemisebenzi ebaluleke kakhulu yeRingi yeCeramic ye-0200-35223 kukulawula umda weplasma. Kwiinkqubo ze-semiconductor eziphambili, uxinano lweplasma kufutshane nomda we-wafer lunokuchaphazela kakhulu ulawulo lobukhulu obubalulekileyo, ukufana kweprofayili, kunye nokuzinza kwenkqubo iyonke. Iringi yeceramic inceda ukulawula ukusasazwa kweplasma kufutshane nomda, ukunciphisa ukuphambuka kwenkqubo kunye nokuphucula ukufana kwe-wafer.
Eli candelo likwanceda ekuzinziseni intsimi ye-RF ngaphakathi kwigumbi. Ngenxa yokuba ukuziphatha kwe-plasma kunxulumene ngokusondeleyo nokusasazwa kwe-impedance kunye nokwakheka kwesheath, i-geometry kunye neempawu ze-dielectric zeringi ye-ceramic zichaphazela ngokuthe ngqo ukusasazwa kwamandla e-ion kunye nokusebenza kakuhle kokudibanisa i-plasma. Oku kwenza iringi ye-ceramic ibe yinxalenye ebalulekileyo yegumbi elakhiwe yi-RF endaweni yokuba yisakhiwo somatshini esingasebenziyo.
Omnye umsebenzi obalulekileyo kukukhusela igumbi. Ngexesha lokusebenza kweplasma enoxinano oluphezulu, iindonga zegumbi kunye nezinto ezikufutshane zivezwa kwi-ion bombardment enamandla kunye neentlobo zeplasma ezisebenzayo. Indandatho yeseramikhi isebenza njengomqobo okhuselayo, inciphisa ukuvezwa kweplasma ngqo kwizakhiwo zegumbi ezinobuthathaka kwaye inceda ukwandisa ubomi benkonzo yezixhobo.
Ukongeza, iringi yeseramikhi ixhasa amaqhinga okunciphisa amasuntswana ngaphakathi kwigumbi. Iiseramikhi ezicocekileyo kakhulu ezinemigangatho emihle yomphezulu zinceda ekunciphiseni umngcipheko wokungcola onxulunyaniswa nokutshiza, ukukhukuliseka, kunye nokuphuma kwegesi, nto leyo ebaluleke kakhulu kwiindawo eziphambili ze-semiconductor apho ukunyamezelana kwamasuntswana kuba nzima ngakumbi.
Iinkonzo zethu
