Ivalwe yeGrafite engqongqo

I-Semixlab Rigid Graphite Felt (RGF) yenziwe njengeyona nto ibalulekileyo yokugquma ubushushu obuphezulu kunye necandelo lolawulo lwe-thermal kuThutho lwePhysical Vapor (PVT) ukukhula kwekristale enye ye-SiC. Yenzelwe ukusetyenziswa kwisizukulwana esilandelayo se-4H- kunye ne-6H-SiC yokuvelisa i-wafer, le mvakalelo eqinile idibanisa i-ultra-low conductivity ye-thermal, ingqibelelo ephezulu yesakhiwo, kunye nokuhlanjululwa kweekhemikhali ezikhethekileyo, okwenza kube yinto esisiseko kwi-high-performance SiC sublimation furnaces. Usetyenziso lwayo luqinisekisa ulawulo oluchanekileyo lweegradient ezishushu, iimeko zokukhula ezizinzile, kunye nomgangatho ophuculweyo wekristale kuyo yonke imijikelo yemveliso yexesha elide.

Kwinkqubo ye-SiC ye-PVT, ukugcina intsimi ye-thermal engaguqukiyo kunye nefanayo kubaluleke kakhulu ekufezekiseni i-crystals enye engenasiphako. I-Graphite Rigid Felt isebenza njengeyona nto iphambili yokugquma isithando somlilo, ejikeleze i-sublimation crucible kunye nezakhiwo zentsimi ye-thermal. Ukuqhuba kwayo okuphantsi kwe-thermal kunciphisa ukulahlekelwa kobushushu okungafunekiyo, ukugcina i-gradient yokushisa ekujoliswe kuyo phakathi komthombo we-SiC kunye nekristale yembewu. Ngokulawula iiprofayili zobushushu be-radial kunye ne-axial, i-RGF inciphisa ukubunjwa kwe-basal plane dislocations, ukupakisha iimpazamo, kunye ne-micropipes, ichaphazela ngokuthe ngqo ubume besakhiwo kunye nokusebenza kwe-elektroniki kwee-wafers ze-SiC ezinesiphumo.

Ngaphaya kwesakhono saso sokugquma kwe-thermal, ubume obuqinileyo be-Semixlab's graphite ivakale ibonelela ngozinzo lomatshini kwiindawo ezinobushushu obungaphezulu kwe-2000°C. Ngokungafaniyo neefesfes ezithambileyo okanye ezithambileyo, i-RGF igcina imilo yayo phantsi kwebhayisikile eshushu yobushushu, ikhusela ukudilika okanye ukuguquka okungaphazamisa intsimi yobushushu okanye ibeke esichengeni ubomi beziko lomlilo. I-inertness yayo yeekhemikhali iqinisekisa ukukhutshwa kwe-particulate encinci kwaye igweme ukungcoliswa kwe-Boule ye-SiC, ebaluleke kakhulu ekuveliseni i-substrates ephezulu yokumelana nombane we-electronics kunye ne-wide-bandgap device applications.

Yenziwe kusetyenziswa i-high-purity graphic carbon and advanced densification techniques, i-Semixlab Graphite Rigid Felt ibonisa ukuxinana okufanayo, uzinzo olubalaseleyo lwe-dimensional, kunye nokuqina kwexesha elide. Ukudibanisa kwayo ukusebenza kwe-thermal kunye nokuqina komatshini kwenza ukuba iifabhi ze-semiconductor zifezekise izinga lokukhula okuhambelanayo, iiprofayili zokushisa ezinokuphinda ziphindwe, kunye nokunciphisa ixesha lokunciphisa kwiinkqubo ze-PVT. Ngokwandisa ukusebenza kakuhle kwe-thermal, i-RGF ikwanegalelo ekongeni amandla ngelixa iphucula ukufana kwe-wafer kunye nesivuno.

I-Semixlab's Rigid Graphite Felt inikezela ngokusebenza, ukucoceka, kunye nokuzinza kwesakhiwo esifunekayo ukuxhasa ukukhula kwekristale eyodwa ye-SiC, ukubonelela abavelisi ngesisombululo esomeleleyo semveliso ye-wafer yesizukulwana esilandelayo, ubomi bomlilo owandisiweyo, kunye nolawulo oluphezulu lwe-thermal kwiindawo eziphakamileyo zokushisa.