I-TaC Coated Deep UV LED Susceptor

I-TaC Coated Deep UV LED Susceptor yinxalenye ebalulekileyo yenkqubo kwiinkqubo ze-metal-organic chemical vapor deposition (MOCVD) ezisetyenziswa ekwenzeni ii-LED ze-deep ultraviolet (UV). Le susceptor yenzelwe ngokukodwa ukusebenza phantsi kweemeko ezinzima zenkqubo, ixhasa ngokuthe ngqo ukufudumeza kwe-wafer kwaye ibonelela ngendawo efunekayo yobushushu kunye neekhemikhali yokukhula kwe-epitaxial esemgangathweni ophezulu ye-aluminium nitride (AlN) kunye ne-aluminium gallium nitride (AlGaN) layers.

Kwinkqubo ye-UV LED MOCVD enzulu, ukukhula kwe-epitaxial kudla ngokuvela kumaqondo obushushu aphezulu kunalawo asetyenziswa kwii-LED zemveli ezisekelwe kwi-gallium nitride, ezihamba namazinga aphezulu kakhulu okuhamba kwe-ammonia kunye nomoya otyebileyo we-nitrogen. Phantsi kwezi meko, izixhobo zemveli ze-susceptor zinokubona ukuwohloka komphezulu, ukukhululwa kwekhabhoni, kunye nokungazinzi kweekhemikhali, okukhokelela ekunciphiseni umgangatho we-epitaxial kunye nokusebenza okuphantsi kwesixhobo. I-tantalum carbide (TaC) yokugquma kumphezulu we-susceptor ibonisa uzinzo olukhethekileyo lobushushu kunye neekhemikhali, okuvumela ukusebenza okuthembekileyo kumaqondo obushushu aphezulu kunye nokugcina iimpawu zomphezulu ezihambelanayo kulo lonke umjikelo wemveliso.

Umsebenzi oyintloko we-TaC Coated Deep UV LED Susceptor kukubonelela ngokufudumeza i-wafer efanayo nephindaphindwayo ngexesha lenkqubo yokukhula kwe-MOCVD. Ukudibanisa i-grafiti substrate esemgangathweni ophezulu kunye ne-dense tantalum carbide coating kuqinisekisa ukudluliselwa kobushushu okusebenzayo kunye neempawu ze-radiative ezizinzileyo, okuvumela ulawulo oluchanekileyo lobushushu be-wafer. Olu zinzo lubalulekile ekulawuleni ngokuchanekileyo ukwakheka kwe-aluminium ekukhuleni kwe-AlGaN epitaxial, okuchaphazela ngokuthe ngqo ukufana kwe-emission wavelength kunye nokusebenza kakuhle kwe-quantum yezixhobo ze-UV ezinzulu.

Okubaluleke ngokufanayo yindima ye-tantalum carbide coating ekuthinteleni ungcoliseko. Ukuxuba i-carbon yingxaki eyaziwayo ekukhuleni kwe-epitaxial ye-UV ejulileyo ye-LED, njengoko nokuba ziingqokelela zekhabhoni ezingasemva zinokuchaphazela kakhulu umgangatho wezinto kunye nobomi besixhobo. I-tantalum carbide coating isebenza njengomqobo oqinileyo wokusasazwa, isusa ngokufanelekileyo umongo wegrafiti kwindawo yenkqubo kwaye inciphisa ukusasazwa kwekhabhoni phantsi kweemeko ze-MOCVD zobushushu obuphezulu. Ukungakwazi kwayo ukusebenzisa iikhemikhali ezininzi kunciphisa nomngcipheko wongcoliseko lwesinyithi, okufaka isandla ekunciphiseni uxinano lweziphene kunye nokuphuculwa kokuthembeka kwesixhobo.

I-TaC Coated Deep UV LED Susceptor ikwabonisa ukumelana okuphezulu kwimeko-bume erhabaxa yeekhemikhali ekhethekileyo kwiinkqubo ze-UV MOCVD ezinzulu. Xa kuthelekiswa nee-susceptors zemveli ezine-silicon carbide-coated, i-tantalum carbide ibonisa uzinzo olukhulu kwi-atmospheres yegesi exutyiweyo ye-ammonia kunye ne-hydrogen-nitrogen, ngaloo ndlela icothisa ukuwohloka kwe-coating kunye nokwandisa ubomi bezinto. Oku kuhlala ixesha elide kuthetha ukuba kukho amaxesha okulungisa amade, ixesha eliphezulu lokusebenza kwezixhobo, kunye neendleko eziphantsi zemveliso.

I-TaC Coated Deep UV LED Susceptor yenzelwe ukuhambelana namaqonga e-MOCVD aqhelekileyo, ukuqinisekisa ukusebenza kweenkqubo rhoqo kwii-wafers kunye neebhetshi, nto leyo ibalulekileyo ekukhuliseni itekhnoloji ye-UV enzulu ye-LED ukuya kwimveliso enkulu. I-susceptor nganye yenziwe phantsi kweenkqubo ezilawulwayo ukuqinisekisa ukufana kwe-coating, ukunamathela okuqinileyo, kunye nokusebenza okuphindaphindwayo kobushushu, okubonisa ukuzibophelela kwe-Semixlab kumgangatho, ukuthembeka, kunye noyilo oluqhutywa yi-application.

Njengenkampani ephambili yetekhnoloji kwinkqubo ye-epitaxial ye-semiconductor yaseTshayina, iSemeixab izibophelele ekuboneleleni ngetekhnoloji ephucukileyo kushishino lwe-semiconductor kunye nezisombululo zemveliso ze-TaC Coated Deep UV LED Susceptor ezenziwe ngokwezifiso. Singafanisa imisebenzi kunye neemodeli ezifanelekileyo zeemveliso zethu neemfuno zakho ezithile zemveliso, siqinisekise ukusebenza kakuhle kwemveliso yenkampani yakho. ISemeixab ilangazelela ukuba liqabane lakho lexesha elide eTshayina.